High-Purity MoO2Cl2（Molybdenum Dioxide Dichloride）
MoO2Cl2 is a next-generation material with a wide range of potential uses in semiconductor processes, such as word lines for 3D NAND Flash. Our MoO2Cl2 has achieved the world’s highest class of purity (6N or above), contributing to the reduction of additional processes such as purification steps.
What Is MoO2Cl2?: Fluorine-Free Precursor for Molybdenum Interconnects
Molybdenum (Mo) is a metal-interconnect material with lower resistivity than tungsten (W) in the microstructure and thin-film realm, contributing to improved scaling and higher density in semiconductor devices.
Moreover, since MoO2Cl2 is a fluorine-free precursor, it promises to improve the reliability of processes compared to existing WF6, and is expected to be adopted for various semiconductor devices.
MoO2Cl2 Semiconductor Applications: 3D NAND Flash, DRAM, and Logic
As an interconnect material, it has high potential for use in 3D NAND Flash, DRAM, logic LSIs, and various other devices.
- 3D NAND Flash: Word lines
- DRAM: Word lines, bit lines, etc.
- Logic: Interconnects, contacts, 2D materials, etc.
Features of Our MoO2Cl2: High Purity, High Bulk Density, and Low Water Content
Semiconductor-Grade Quality
- We offer a lineup of high-purity 5N (99.999% purity) and 6N (99.9999% purity)* products.
- The quality needed for semiconductor use is met with no additional refining, helping to lower total costs.
- * Patent pending (international publication number: WO2021171742)
High Bulk Density
- The high bulk density makes it possible to increase the amount in canisters.
- This means fewer canister replacements, shorter equipment downtime, and other benefits that promise to improve the cost-efficiency of operations.
Low Water Content
- By controlling the moisture content, the formation of hydrates is reduced. As a result, the amount of residue in the canister during film deposition can be minimized, allowing more effective utilization of the filled MoO2Cl2.
Photos of MoO2Cl2
Supply Chain
As a raw materials manufacturer, we offer a stable supply of high-purity MoO2Cl2.
Packaging and shipping form
The product is shipped in glass bottles inside an airtight package. Please inquire for further details.
Ask us also about filling in individual containers.
Current Availability
Our MoO2Cl2 is currently mass-produced in Japan.
To request samples, please use the contact form below.
Inquiries accepted 24 hours a day