Under DevelopmentAlSc Sputtering Target

A radio frequency (RF) filter is used for operation in mobile communication devices in the 800 to 2,500 MHz band.
SAW filters, using surface acoustic waves (SAW) that propagate across the surface of a piezoelectric substrate, are widely used as the RF filter.
More recently, commercial use of bulk acoustic waves (BAW) has progressed, and adoption of BAW is spreading in difficult bands where conventional SAW filters are not usable. In this situation, we are providing AlSc targets, with superior properties to earlier materials. AlScN alloy promises a high piezoelectric constant, some ten times higher than conventional AlN alloy.
We developed a manufacturing process to produce AlSc target with much lower oxygen - which affects piezoelectric properties - compared to existing AlSc targets.